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APPLICATIONS

Inside the process

Explore how materials and components connect with specific processes.

Plasma etch & deposition

PLASMA ETCH & DEPOSITION

Plasma etch & deposition

Focus rings, showerheads, susceptors and edge rings connect silicon carbide materials with semiconductor processing. Discuss materials and components for your process conditions, geometry and cleanliness requirements.

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Oxidation, diffusion & heat treatment

THERMAL PROCESSING

Oxidation, diffusion & heat treatment

The product range includes silicon carbide boats, pedestal bases, inner tubes, furnace tubes and thermal insulators for support and handling in thermal processes.

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Epitaxy & MOCVD

EPITAXY & MOCVD

Epitaxy & MOCVD

Explore pressureless sintered silicon carbide and coating materials for epitaxy susceptors, MOCVD susceptors and heaters.

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LET’S TALK MATERIALS

Start with your process.

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