
SCM 401 / 421 / 521
Silicon carbide ceramics
Silicon carbide ceramics for oxidation, diffusion and heat treatment, including boats, tubes, pedestal bases and rings.

SCS 801
Silicon carbide produced by chemical vapor deposition for plasma etch and rapid thermal processing applications.
Enquire about this productTechnical data gives typical values. Performance depends on material specifications and operating conditions. Contact our team to confirm your selection.
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